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dc.contributor.authorStrempel, Verena E.-
dc.contributor.authorNaumann d’Alnoncourt, Raoul-
dc.contributor.authorDrieß, Matthias-
dc.contributor.authorRosowski, Frank-
dc.descriptionThis article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 88, 074102 (2017) and may be found at
dc.description.abstractA modular setup for Atomic Layer Deposition (ALD) on high-surface powder substrates in fixed bed reactors with a gravimetric in situ monitoring was developed. The design and operation are described in detail. An integrated magnetically suspended balance records mass changes during ALD. The highly versatile setup consists of three modular main units: a dosing unit, a reactor unit, and a downstream unit. The reactor unit includes the balance, a large fixed bed reactor, and a quartz crystal microbalance. The dosing unit is equipped with a complex manifold to deliver gases and gaseous reagents including three different ALD precursors, five oxidizing or reducing agents, and two purge gas lines. The system employs reactor temperatures and pressures in the range of 25-600 °C and 10−3 to 1 bar, respectively. Typically, powder batches between 100 mg and 50 g can be coated. The capabilities of the setup are demonstrated by coating mesoporous SiO2 powder with a thin AlOx (submono) layer using three cycles with trimethylaluminium and H2O. The self-limiting nature of the deposition has been verified with the in situ gravimetric monitoring and full saturation curves are presented. The process parameters were used for a scale-up in a large fixed bed reactor. The samples were analyzed with established analytics such as X-ray diffraction, N2 adsorption, transmission electron microscopy, and inductively coupled plasma optical emission spectrometry.en
dc.description.sponsorshipDFG, 53182490, EXC 314: Unifying Concepts in Catalysisen
dc.subject.ddc660 Chemische Verfahrenstechnikde
dc.subject.otheratomic layer depositionen
dc.subject.otherfixed bed reactoren
dc.subject.othermetal oxideen
dc.titleAtomic layer deposition on porous powders with in situ gravimetric monitoring in a modular fixed bed reactor setupen
tub.publisher.universityorinstitutionTechnische Universität Berlinen
dcterms.bibliographicCitation.journaltitleReview of Scientific Instrumentsen
dcterms.bibliographicCitation.originalpublisherplaceMelville, NYen
dcterms.bibliographicCitation.originalpublishernameAmerican Institute of Physics (AIP)en
tub.affiliationVerbundforschung » Exzellenzcluster (EXC) » BasCat Joint Labde
tub.affiliation » BasCat Joint Labde
tub.affiliationFak. 2 Mathematik und Naturwissenschaften » Inst. Chemie » FG Metallorganische Chemie und Anorganische Materialiende
Appears in Collections:Technische Universität Berlin » Publications

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