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Main Title: Advanced in-situ electron-beam lithography for deterministic nanophotonic device processing
Author(s): Kaganskiy, Arsenty
Gschrey, Manuel
Schlehahn, Alexander
Schmidt, Ronny
Schulze, Jan-Hindrik
Heindel, Tobias
Strittmatter, André
Rodt, Sven
Reitzenstein, Stephan
Type: Article
Abstract: We report on an advanced in-situ electron-beam lithography technique based on high-resolution cathodoluminescence (CL) spectroscopy at low temperatures. The technique has been developed for the deterministic fabrication and quantitative evaluation of nanophotonic structures. It is of particular interest for the realization and optimization of non-classical light sources which require the pre-selection of single quantum dots (QDs) with very specific emission features. The two-step electron-beam lithography process comprises (a) the detailed optical study and selection of target QDs by means of CL-spectroscopy and (b) the precise retrieval of the locations and integration of target QDs into lithographically defined nanostructures. Our technology platform allows for a detailed pre-process determination of important optical and quantum optical properties of the QDs, such as the emission energies of excitonic complexes, the excitonic fine-structure splitting, the carrier dynamics, and the quantum nature of emission. In addition, it enables a direct and precise comparison of the optical properties of a single QD before and after integration which is very beneficial for the quantitative evaluation of cavity-enhanced quantum devices.
Subject(s): emission spectroscopy
quantum dot
quantum information
Issue Date: 21-Jul-2015
Date Available: 19-May-2020
Language Code: en
DDC Class: 530 Physik
Sponsor/Funder: DFG, 43659573, SFB 787: Halbleiter - Nanophotonik: Materialien, Modelle, Bauelemente
Journal Title: Review of Scientific Instruments
Publisher: American Institute of Physics (AIP)
Volume: 86
Issue: 7
Article Number: 073903
Publisher DOI: 10.1063/1.4926995
EISSN: 1089-7623
ISSN: 0034-6748
Notes: This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Review of Scientific Instruments 86, 073903 (2015) and may be found at
TU Affiliation(s): Fak. 2 Mathematik und Naturwissenschaften » Inst. Festkörperphysik » AG Optoelektronik und Quantenbauelemente
Appears in Collections:Technische Universität Berlin » Publications

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