Please use this identifier to cite or link to this item: http://dx.doi.org/10.14279/depositonce-10083
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Main Title: Mask-based dual-axes tomoholography using soft x-rays
Author(s): Guehrs, Erik
Fohler, Manuel
Frömmel, Stefanie
Günther, Christian M.
Hessing, Piet
Schneider, Michael
Shemilt, Laura
Eisebitt, Stefan
Type: Article
Language Code: en
Abstract: We explore tomographic mask-based Fourier transform x-ray holography with respect to the use of a thin slit as a reference wave source. This imaging technique exclusively uses the interference between the waves scattered by the object and the slit simplifying the experimental realization and ensuring high data quality. Furthermore, we introduce a second reference slit to rotate the sample around a second axis and to record a dual-axes tomogram. Compared to a single-axis tomogram, the reconstruction artifacts are decreased in accordance with the reduced missing data wedge. Two demonstration experiments are performed where test structures are imaged with a lateral resolution below 100 nm.
URI: https://depositonce.tu-berlin.de/handle/11303/11192
http://dx.doi.org/10.14279/depositonce-10083
Issue Date: 2015
Date Available: 22-May-2020
DDC Class: 530 Physik
Subject(s): tomography
x-ray FTH
HERALDO
Fourier transform holography
License: https://creativecommons.org/licenses/by/3.0/
Journal Title: New Journal of Physics
Publisher: IOP Publishing
Publisher Place: Bristol
Volume: 17
Issue: 10
Article Number: 103042
Publisher DOI: 10.1088/1367-2630/17/10/103042
EISSN: 1367-2630
Appears in Collections:FG Röntgenoptik und Nanometer-Optik » Publications

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