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Main Title: CSAR 62 as negative-tone resist for high-contrast e-beam lithography at temperatures between 4 K and room temperature
Author(s): Kaganskiy, Arsenty
Heuser, Tobias
Schmidt, Ronny
Rodt, Sven
Reitzenstein, Stephan
Type: Article
Language Code: en
Abstract: The temperature dependence of the electron-beam sensitive resist CSAR 62 is investigated in its negative-tone regime. The writing temperatures span a wide range from 4 K to room temperature with the focus on the liquid helium temperature regime. The importance of low temperature studies is motivated by the application of CSAR 62 for deterministic nanophotonic device processing by means of in situ electron-beam lithography. At low temperature, CSAR 62 exhibits a high contrast of 10.5 and a resolution of 49 nm. The etch stability is almost temperature independent and it is found that CSAR 62 does not suffer from peeling which limits the low temperature application of the standard electron-beam resist polymethyl methacrylate. As such, CSAR 62 is a very promising negative-tone resist for in situ electron-beam lithography of high quality nanostructures at low temperature.
Issue Date: 29-Nov-2016
Date Available: 13-Jan-2021
DDC Class: 530 Physik
Subject(s): CSAR 62
electron-beam lithography
Sponsor/Funder: EC/FP7/615613/EU/External Quantum Control of Photonic Semiconductor Nanostructures/EXQUISITE
DFG, 43659573, SFB 787: Halbleiter - Nanophotonik: Materialien, Modelle, Bauelemente
Journal Title: Journal of vacuum science & technology B
Publisher: American Institute of Physics
Publisher Place: New York, NY
Volume: 34
Issue: 6
Article Number: 061603
Publisher DOI: 10.1116/1.4965883
EISSN: 2327-9877
ISSN: 2166-2746
Appears in Collections:AG Optoelektronik und Quantenbauelemente » Publications

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