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Main Title: A 310 nm optically pumped AlGaN vertical-cavity surface-emitting laser
Author(s): Hjort, Filip
Enslin, Johannes
Cobet, Munise
Bergmann, Michael A.
Gustavsson, Johan
Kolbe, Tim
Knauer, Arne
Nippert, Felix
Häusler, Ines
Wagner, Markus R.
Wernicke, Tim
Kneissl, Michael
Haglund, Åsa
Type: Article
Abstract: Ultraviolet light is essential for disinfection, fluorescence excitation, curing, and medical treatment. An ultraviolet light source with the small footprint and excellent optical characteristics of vertical-cavity surface-emitting lasers (VCSELs) may enable new applications in all these areas. Until now, there have only been a few demonstrations of ultraviolet-emitting VCSELs, mainly optically pumped, and all with low Al-content AlGaN cavities and emission near the bandgap of GaN (360 nm). Here, we demonstrate an optically pumped VCSEL emitting in the UVB spectrum (280–320 nm) at room temperature, having an Al0.60Ga0.40N cavity between two dielectric distributed Bragg reflectors. The double dielectric distributed Bragg reflector design was realized by substrate removal using electrochemical etching. Our method is further extendable to even shorter wavelengths, which would establish a technology that enables VCSEL emission from UVA (320–400 nm) to UVC (<280 nm).
Subject(s): etching
Issue Date: 17-Dec-2020
Date Available: 31-Mar-2021
Language Code: en
DDC Class: 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten
Sponsor/Funder: EC/H2020/865622/EU/Out of the blue: membrane-based microcavity lasers from the blue to the ultraviolet wavelength regime/UV-LASE
DFG, 43659573, SFB 787: Halbleiter - Nanophotonik: Materialien, Modelle, Bauelemente
DFG, 324666853, Berliner Netzwerk für Elektronenmikroskopie - Elektronenholographie an Nanoskaligen Halbleiterstrukturen
Journal Title: ACS Photonics
Publisher: American Chemical Society (ACS)
Volume: 8
Issue: 1
Publisher DOI: 10.1021/acsphotonics.0c01382
Page Start: 135
Page End: 141
EISSN: 2330-4022
TU Affiliation(s): Fak. 2 Mathematik und Naturwissenschaften » Inst. Festkörperphysik » FG Optische Charakterisierung von Halbleitern
Appears in Collections:Technische Universität Berlin » Publications

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