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Main Title: Determination of the effective detector area of an energy-dispersive X-ray spectrometer at the scanning electron microscope using experimental and theoretical X-ray emission yields
Author(s): Procop, Mathias
Hodoroaba, Vasile-Dan
Terborg, Ralf
Berger, Dirk
Type: Article
Language Code: en
Abstract: A method is proposed to determine the effective detector area for energy-dispersive X-ray spectrometers (EDS). Nowadays, detectors are available for a wide range of nominal areas ranging from 10 up to 150 mm2. However, it remains in most cases unknown whether this nominal area coincides with the “net active sensor area” that should be given according to the related standard ISO 15632, or with any other area of the detector device. Moreover, the specific geometry of EDS installation may further reduce a given detector area. The proposed method can be applied to most scanning electron microscope/EDS configurations. The basic idea consists in a comparison of the measured count rate with the count rate resulting from known X-ray yields of copper, titanium, or silicon. The method was successfully tested on three detectors with known effective area and applied further to seven spectrometers from different manufacturers. In most cases the method gave an effective area smaller than the area given in the detector description.
Issue Date: 2016
Date Available: 23-Nov-2017
DDC Class: 570 Biowissenschaften; Biologie
Subject(s): energy-dispersive X-ray spectrometer
effective area
X-ray emission yield
geometrical collection efficiency
Journal Title: Microscopy and microanalysis
Publisher: Cambridge University Press
Publisher Place: New York, NY
Volume: 22
Issue: 6
Publisher DOI: 10.1017/s1431927616011788
Page Start: 1360
Page End: 1368
EISSN: 1435-8115
ISSN: 1431-9276
Notes: Dieser Beitrag ist mit Zustimmung des Rechteinhabers aufgrund einer (DFG geförderten) Allianz- bzw. Nationallizenz frei zugänglich.
This publication is with permission of the rights owner freely accessible due to an Alliance licence and a national licence (funded by the DFG, German Research Foundation) respectively.
Appears in Collections:Zentraleinrichtung Elektronenmikroskopie (ZELMI) » Publications

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