FG Halbleiterbauelemente

1 Items

Recent Submissions
Contactless visible light probing for nanoscale ICs through 10 μm bulk silicon

Boit, Christian ; Lohrke, Heiko ; Scholz, Philipp ; Beyreuther, Anne ; Kerst, Uwe ; Iwaki, Y. (2015)

This paper explains why only optical techniques will be able to provide debug and diagnosis of bulk silicon FinFET technologies. In order to apply optical techniques through a convenient thickness of silicon on the one hand, light is limited to NIR to minimize absorption. To match resolution requirements on the other hand, it becomes mandatory to use shorter wavelengths. Two key issues have to ...