Vogt, Ivo (2018)
This work investigates and improves two common techniques of electronics failure analysis, (spectral) photon emission microscopy (PEM/SPEM) and electro-optical frequency mapping (EOFM). The scientific focus is set on the physical interaction between light and an active semiconductor device. Investigated test structures include 14-40nm FinFETs of several technology generations, as well as planar...Contactless visible light probing for nanoscale ICs through 10 μm bulk silicon
Boit, Christian ; Lohrke, Heiko ; Scholz, Philipp ; Beyreuther, Anne ; Kerst, Uwe ; Iwaki, Y. (2015)
This paper explains why only optical techniques will be able to provide debug and diagnosis of bulk silicon FinFET technologies. In order to apply optical techniques through a convenient thickness of silicon on the one hand, light is limited to NIR to minimize absorption. To match resolution requirements on the other hand, it becomes mandatory to use shorter wavelengths. Two key issues have to ...