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Subject <Equals> "confocal microscopy" Date Issued <Equals> "2015" Subject <Equals> "FinFET" Subject <Equals> "low power IC" Subject <Equals> "SIL" Subject <Equals> "620 Ingenieurwissenschaften und zugeordnete Tätigkeiten" Author <Equals> "Beyreuther, Anne" Subject <Equals> "bulk Si" Type <Equals> "Conference Object"


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