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Subject <Equals> "confocal microscopy" Subject <Equals> "LVI" Subject <Equals> "EOFM" Subject <Equals> "SIL" Subject <Equals> "debug" Subject <Equals> "bulk Si" Subject <Equals> "FinFET" Type <Equals> "Conference Object" Subject <Equals> "low power IC" Author <Equals> "Kerst, Uwe" Subject <Equals> "nanoscale IC"


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