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Subject <Equals> "confocal microscopy" Subject <Equals> "LVI" Subject <Equals> "nanoscale IC" Subject <Equals> "FinFET" Author <Equals> "Kerst, Uwe" Subject <Equals> "620 Ingenieurwissenschaften und zugeordnete Tätigkeiten" Subject <Equals> "backside failure analysis" Date Issued <Equals> "2015" Subject <Equals> "EOP" Author <Equals> "Iwaki, Y."

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Boit_etal_NANOTS2015.pdf.jpg2015Contactless visible light probing for nanoscale ICs through 10 μm bulk siliconBoit, Christian; Lohrke, Heiko; Scholz, Philipp; Beyreuther, Anne; Kerst, Uwe, et al-

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