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Main Title: Laboratory based GIXRF and GEXRF spectrometers for multilayer structure investigations
Author(s): Szwedowski-Rammert, Veronika
Baumann, Jonas
Schlesiger, Christopher
Waldschläger, Ulrich
Gross, Armin
Kanngießer, Birgit
Mantouvalou, Ioanna
Type: Article
Language Code: en
Abstract: This work reports laboratory angle resolved measurements with the goal of establishing laboratory techniques to obtain a more complete idea of the intralayer composition of multilayer samples. While X-ray reflectometry is a widely available technique for the characterization of multilayer samples, angle resolved XRF measurements (grazing emission/incidence X-ray fluorescence) are usually performed at synchrotron radiation facilities. With the development of efficient laboratory spectrometers and evaluation algorithms for angle resolved measurements, these methods become suited for routine measurements and screening. We present two laboratory spectrometers which make quantitative non-destructive elemental depth profiling feasible. For reasons of comparison a validation sample, a nickel–carbon multilayer sample, is measured with both setups and additional information on krypton contamination and its distribution is retrieved. Additionally, the first application for the characterization of multilayer structures with sub-nanometer layer thicknesses is shown.
Issue Date: 11-Feb-2019
Date Available: 19-Jun-2019
DDC Class: 540 Chemie und zugeordnete Wissenschaften
530 Physik
Subject(s): multilayer samples
angle resolved XRF measurements
laboratory spectrometer
Sponsor/Funder: TU Berlin, Open-Access-Mittel - 2019
Journal Title: Journal of Analytical Atomic Spectrometry
Publisher: Royal Society of Chemistry
Publisher Place: Cambridge
Volume: 34
Issue: 5
Publisher DOI: 10.1039/C8JA00427G
Page Start: 922
Page End: 929
EISSN: 1364-5544
ISSN: 0267-9477
Appears in Collections:FG Analytische Röntgenphysik » Publications

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