Please use this identifier to cite or link to this item: http://dx.doi.org/10.14279/depositonce-8984
Main Title: A Miniaturized UV-LED Based Optical Gas Sensor Utilizing Silica Waveguides for the Measurement of Nitrogen Dioxide and Sulphur Dioxide
Author(s): Elmlinger, Philipp
Schreivogel, Martin
Weida, Simon
Kneissl, Michael
Type: Article
Language Code: en
Abstract: Continuing advances in the development of light-emitting diodes (LEDs) in the deep ultraviolet spectral range (DUV) enable miniaturized, mobile, and cost-effective DUV gas sensors. Efficient light coupling, guiding, and splitting plays a key role for stable sensor systems and is realized by lowloss silica based waveguides, fabricated by ultrashort pulsed laser etching and laser polishing. The tapered waveguide leads to a significantly higher efficiency with less required space compared to optical fibers or free beam setups, respectively. Toxic gases like NO2 and SO2 were successfully measured down to 1 ppm utilizing LEDs with wavelengths of 395 nm and 280 nm.
URI: https://depositonce.tu-berlin.de/handle/11303/9993
http://dx.doi.org/10.14279/depositonce-8984
Issue Date: 15-Aug-2017
Date Available: 10-Sep-2019
DDC Class: 535 Licht, Infrarot- und Ultraviolettphänomene
Subject(s): gas sensor
waveguide
UV
LED
absorption spectroscopy
laser processing
glass
Sponsor/Funder: BMBF, 13N12587, UltraSens - Design, Wachstum und Charakterisierung von UV-C-LEDs
BMBF, 13N12588, UltraSens - Wachstum, Prozessierung und Charakterisierung von UV-C LEDs
License: https://creativecommons.org/licenses/by/4.0/
Journal Title: Proceedings
Publisher: MDPI
Publisher Place: Basel
Volume: 1
Issue: 4
Article Number: 556
Publisher DOI: 10.3390/proceedings1040556
EISSN: 2504-3900
Appears in Collections:FG Experimentelle Nanophysik und Photonik » Publications

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