GaAs-based subwavelength grating on an AlOx layer for a vertical-cavity surface-emitting laser

dc.contributor.authorLiu, Anjin
dc.contributor.authorYang, Bo
dc.contributor.authorWolf, Philip
dc.contributor.authorZhang, Jing
dc.contributor.authorBimberg, Dieter
dc.date.accessioned2020-05-22T15:10:25Z
dc.date.available2020-05-22T15:10:25Z
dc.date.issued2020
dc.description© 2020 Optical Society of America. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved.en
dc.description.abstractA GaAs-based subwavelength grating on a thick (∼3/4*λ at 1300 nm) AlOx layer is designed, fabricated, and characterized. The AlOx layer as a low-index medium is oxidized from a 640-nm Al0.9Ga0.1As layer. The layer contraction of the Al0.9Ga0.1As layer after wet oxidation to AlOx is 4.9%. We fabricated GaAs-based subwavelength gratings on the AlOx layer showing a high reflectivity of 90% in the 1300-nm wavelength range, consistent with the simulation results. Such GaAs-based subwavelength gratings can be used as high-contrast grating mirrors for narrow-linewidth VCSELs, improving the mechanical stability and simplifying the device fabrication.en
dc.identifier.eissn2578-7519
dc.identifier.urihttps://depositonce.tu-berlin.de/handle/11303/11210
dc.identifier.urihttp://dx.doi.org/10.14279/depositonce-10098
dc.language.isoen
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/
dc.subject.ddc530 Physikde
dc.subject.othervertical-cavity surface-emitting lasersen
dc.subject.otherVCSELen
dc.subject.otherlaseren
dc.titleGaAs-based subwavelength grating on an AlOx layer for a vertical-cavity surface-emitting laseren
dc.typeArticleen
dc.type.versionpublishedVersionen
dcterms.bibliographicCitation.doi10.1364/OSAC.384327
dcterms.bibliographicCitation.issue2
dcterms.bibliographicCitation.journaltitleOSA Continuumen
dcterms.bibliographicCitation.originalpublishernameThe Optical Societyen
dcterms.bibliographicCitation.originalpublisherplaceWashington, DCen
dcterms.bibliographicCitation.pageend324
dcterms.bibliographicCitation.pagestart317
dcterms.bibliographicCitation.volume3
tub.accessrights.dnbfree
tub.affiliationFak. 2 Mathematik und Naturwissenschaften::Inst. Festkörperphysikde
tub.affiliation.facultyFak. 2 Mathematik und Naturwissenschaftende
tub.affiliation.instituteInst. Festkörperphysikde
tub.publisher.universityorinstitutionTechnische Universität Berlinde

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