Mask-based dual-axes tomoholography using soft x-rays

dc.contributor.authorGuehrs, Erik
dc.contributor.authorFohler, Manuel
dc.contributor.authorFrömmel, Stefanie
dc.contributor.authorGünther, Christian M.
dc.contributor.authorHessing, Piet
dc.contributor.authorSchneider, Michael
dc.contributor.authorShemilt, Laura
dc.contributor.authorEisebitt, Stefan
dc.date.accessioned2020-05-22T07:10:13Z
dc.date.available2020-05-22T07:10:13Z
dc.date.issued2015
dc.description.abstractWe explore tomographic mask-based Fourier transform x-ray holography with respect to the use of a thin slit as a reference wave source. This imaging technique exclusively uses the interference between the waves scattered by the object and the slit simplifying the experimental realization and ensuring high data quality. Furthermore, we introduce a second reference slit to rotate the sample around a second axis and to record a dual-axes tomogram. Compared to a single-axis tomogram, the reconstruction artifacts are decreased in accordance with the reduced missing data wedge. Two demonstration experiments are performed where test structures are imaged with a lateral resolution below 100 nm.en
dc.identifier.eissn1367-2630
dc.identifier.urihttps://depositonce.tu-berlin.de/handle/11303/11192
dc.identifier.urihttp://dx.doi.org/10.14279/depositonce-10083
dc.language.isoen
dc.rights.urihttps://creativecommons.org/licenses/by/3.0/
dc.subject.ddc530 Physikde
dc.subject.othertomographyen
dc.subject.otherx-ray FTHen
dc.subject.otherHERALDOen
dc.subject.otherFourier transform holographyen
dc.titleMask-based dual-axes tomoholography using soft x-raysen
dc.typeArticleen
dc.type.versionpublishedVersionen
dcterms.bibliographicCitation.articlenumber103042
dcterms.bibliographicCitation.doi10.1088/1367-2630/17/10/103042
dcterms.bibliographicCitation.issue10
dcterms.bibliographicCitation.journaltitleNew Journal of Physicsen
dcterms.bibliographicCitation.originalpublishernameIOP Publishingen
dcterms.bibliographicCitation.originalpublisherplaceBristolen
dcterms.bibliographicCitation.volume17
tub.accessrights.dnbfree
tub.affiliationFak. 2 Mathematik und Naturwissenschaften::Inst. Optik und Atomare Physik::FG Röntgenoptik und Nanometer-Optikde
tub.affiliation.facultyFak. 2 Mathematik und Naturwissenschaftende
tub.affiliation.groupFG Röntgenoptik und Nanometer-Optikde
tub.affiliation.instituteInst. Optik und Atomare Physikde
tub.publisher.universityorinstitutionTechnische Universität Berlinde

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