Mechanistic studies of atomic layer deposition on oxidation catalysts – AlOx and POx deposition

dc.contributor.authorKnemeyer, Kristian
dc.contributor.authorHermida, Mar Piernavieja
dc.contributor.authorIngale, Piyush
dc.contributor.authorSchmidt, Johannes
dc.contributor.authorKröhnert, Jutta
dc.contributor.authorNaumann d’Alnoncourt, Raoul
dc.contributor.authorDriess, Matthias
dc.contributor.authorRosowski, Frank
dc.date.accessioned2020-12-28T11:53:06Z
dc.date.available2020-12-28T11:53:06Z
dc.date.issued2020-07-15
dc.description.abstractAtomic layer deposition is a rising technique for catalyst synthesis and modification. Typically, the focus of ALD in catalysis is on supported metal nanoparticles. Here, the authors give mechanistic insights into the ALD of oxides on redox active catalysts by a combination of in situ analytics, such as XPS, DRIFTS and gravimetric measurements. Phosphorus oxide and aluminum oxide were deposited on divanadium pentoxide powder in a fixed bed reactor. In contrast to the generally accepted concepts, the first half cycle does not proceed over surface hydroxyl groups but involves redox chemistry between the precursor and the vanadium atoms, as shown by 31P-SSNMR and XPS. For POx deposition, a temperature step from 150 °C in the first half cycle to 450 °C in the second half cycle is needed to obtain linear mass gain per cycle as the remaining ligands are combusted and reduced vanadium atoms are reoxidized. Homogeneous deposition was confirmed by STEM-EDX and XRD showing no additional phases, despite performing up to 10 ALD cycles. Even the well-known process of alumina ALD confirms the involvement of reduction–oxidation reactions between the ALD precursor and the substrate V2O5. However, redox chemistry can be suppressed for alumina ALD at low temperatures of 50 °C. Therefore, this study shows that ALD on oxidation catalysts is complex and thus the developed ALD processes are unusual compared to ALD on typical supports, such as SiO2 or Al2O3.en
dc.description.sponsorshipTU Berlin, Open-Access-Mittel – 2020en
dc.description.sponsorshipDFG, 390540038, EXC 2008: Unifying Systems in Catalysis "UniSysCat"en
dc.identifier.eissn1463-9084
dc.identifier.issn1463-9076
dc.identifier.urihttps://depositonce.tu-berlin.de/handle/11303/12250
dc.identifier.urihttp://dx.doi.org/10.14279/depositonce-11126
dc.language.isoenen
dc.relation.ispartof10.14279/depositonce-12409en
dc.rights.urihttps://creativecommons.org/licenses/by-nc/3.0/en
dc.subject.ddc540 Chemie und zugeordnete Wissenschaftende
dc.subject.otheratomic layer depositionen
dc.subject.otheroxidation catalystsen
dc.subject.otherAlOxen
dc.subject.otherPOxen
dc.titleMechanistic studies of atomic layer deposition on oxidation catalysts – AlOx and POx depositionen
dc.typeArticleen
dc.type.versionpublishedVersionen
dcterms.bibliographicCitation.doi10.1039/D0CP02572Ken
dcterms.bibliographicCitation.issue32en
dcterms.bibliographicCitation.journaltitlePhysical Chemistry, Chemical Physicsen
dcterms.bibliographicCitation.originalpublishernameRoyal Society of Chemistryen
dcterms.bibliographicCitation.originalpublisherplaceLondonen
dcterms.bibliographicCitation.pageend18006en
dcterms.bibliographicCitation.pagestart17999en
dcterms.bibliographicCitation.volume22en
tub.accessrights.dnbfreeen
tub.affiliationFak. 2 Mathematik und Naturwissenschaften::Inst. Chemie::FG Funktionsmaterialiende
tub.affiliationVerbundforschung::Exzellenzcluster (EXC)::BasCat Joint Labde
tub.affiliationVerbundforschung::Exzellenzcluster (EXC)::BasCat Joint Labde
tub.affiliation.facultyFak. 2 Mathematik und Naturwissenschaftende
tub.affiliation.facultyVerbundforschungde
tub.affiliation.groupFG Funktionsmaterialiende
tub.affiliation.groupBasCat Joint Labde
tub.affiliation.groupBasCat Joint Labde
tub.affiliation.instituteInst. Chemiede
tub.affiliation.instituteExzellenzcluster (EXC)de
tub.publisher.universityorinstitutionTechnische Universität Berlinen

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