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High frequency operation of an integrated electro-absorption modulator onto a vertical-cavity surface-emitting laser

Marigo-Lombart, Ludovic; Rumeau, A.; Viallon, Christophe; Arnoult, A.; Calvez, Stephane; Monmayrant, A.; Gauthier-Lafaye, O.; Rosales, R.; Lott, James A.; Thienpont, Hugo; Panajotov, Krassimir; Almuneau, Guilhem

AG Halbleiter Nanophononik und Nanophotonik

We present in this paper the vertical integration of an electro-absorption modulator (EAM) onto a vertical-cavity surface-emitting laser (VCSEL). We discuss the design, fabrication, and measured characteristics of the combined VCSEL and EAM. We previously demonstrated a standalone EAM with an optical bandwidth around 30 GHz. In this paper we present for the first time an optical bandwidth of 30 GHz for an EAM integrated onto a VCSEL. This device exhibits single-mode operation and a very low chirp, below 0.1 nm, even with a modulation depth of 70% which makes this device very competitive for high-speed communications in data centers.