Fabrication and characterization of integrable GaAs-based high-contrast grating reflector and Fabry-Pérot filter array with GaInP sacrificial layer

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dc.contributor.authorLiu, Anjin
dc.contributor.authorWolf, Philip
dc.contributor.authorSchulze, Jan-Hindrik
dc.contributor.authorBimberg, Dieter
dc.date.accessioned2020-05-22T15:10:20Z
dc.date.available2020-05-22T15:10:20Z
dc.date.issued2016
dc.description.abstractIntegrable GaAs-based high-contrast gratings (HCGs) are fabricated and characterized, targeting applications in high-speed vertical-cavity surface-emitting lasers (VCSELs). A Ga 0.51 In 0.49 P sacrificial layer beneath the GaAs layer is employed to create a low index surrounding HCG strips by selective etching. Experimental results show that the finite-size HCG has a reflectivity of 93% from 1270 to 1330 nm for the transverse magnetic polarization, which is consistent with the calculated results. An HCG-based Fabry-Perot filter array formed by the different HCGs, air gap, and GaAs substrate is demonstrated. The measured resonance wavelengths of the filter arrays are consistent with the theoretical results, which implies that the resonance wavelength of such filters can be tuned by parameters of the HCG itself.en
dc.identifier.eissn1943-0655
dc.identifier.urihttps://depositonce.tu-berlin.de/handle/11303/11208
dc.identifier.urihttp://dx.doi.org/10.14279/depositonce-10096
dc.language.isoen
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/
dc.subject.ddc530 Physikde
dc.subject.othergratingsen
dc.subject.othersubwavelength structuresen
dc.subject.othermirrorsen
dc.subject.othervertical-cavity surface-emitting laseren
dc.subject.otherVCSELen
dc.subject.otherwavelength filtering devicesen
dc.titleFabrication and characterization of integrable GaAs-based high-contrast grating reflector and Fabry-Pérot filter array with GaInP sacrificial layeren
dc.typeArticleen
dc.type.versionpublishedVersionen
dcterms.bibliographicCitation.articlenumber2700509
dcterms.bibliographicCitation.doi10.1109/JPHOT.2016.2520834
dcterms.bibliographicCitation.issue1
dcterms.bibliographicCitation.journaltitleIEEE Photonics Journalen
dcterms.bibliographicCitation.originalpublishernameInstitute of Electrical and Electronics Engineers (IEEE)en
dcterms.bibliographicCitation.originalpublisherplaceNew York, NYen
dcterms.bibliographicCitation.volume8
tub.accessrights.dnbfree
tub.affiliationFak. 2 Mathematik und Naturwissenschaften::Inst. Festkörperphysikde
tub.affiliation.facultyFak. 2 Mathematik und Naturwissenschaftende
tub.affiliation.instituteInst. Festkörperphysikde
tub.publisher.universityorinstitutionTechnische Universität Berlinde
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