Marigo-Lombart, LudovicRumeau, A.Viallon, ChristopheArnoult, A.Calvez, StephaneMonmayrant, A.Gauthier-Lafaye, O.Rosales, R.Lott, James A.Thienpont, HugoPanajotov, KrassimirAlmuneau, Guilhem2022-02-082022-02-082019-01-15https://depositonce.tu-berlin.de/handle/11303/16311http://dx.doi.org/10.14279/depositonce-15086We present in this paper the vertical integration of an electro-absorption modulator (EAM) onto a vertical-cavity surface-emitting laser (VCSEL). We discuss the design, fabrication, and measured characteristics of the combined VCSEL and EAM. We previously demonstrated a standalone EAM with an optical bandwidth around 30 GHz. In this paper we present for the first time an optical bandwidth of 30 GHz for an EAM integrated onto a VCSEL. This device exhibits single-mode operation and a very low chirp, below 0.1 nm, even with a modulation depth of 70% which makes this device very competitive for high-speed communications in data centers.en530 Physikvertical cavity surface emitting lasersmodulatorhigh frequency characterizationArticle2022-02-032515-7647