Gür, Uğur MeriçYang, YuhuiSchall, JohannesSchmidt, RonnyKaganskiy, ArsentyWang, YujingVannucci, LucaMattes, MichaelArslanagić, SamelReitzenstein, StephanGregersen, Niels2022-05-202022-05-202022-03-25https://depositonce.tu-berlin.de/handle/11303/16966http://dx.doi.org/10.14279/depositonce-15745© 2022 Optica Publishing Group. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved.We report on the design of nanohole/nanobeam cavities in ridge waveguides for on-chip, quantum-dot-based single-photon generation. Our design overcomes limitations of a low-refractive-index-contrast material platform in terms of emitter-mode coupling efficiency and yields an outcoupling efficiency of 0.73 to the output ridge waveguide. Importantly, this high coupling efficiency is combined with broadband operation of 9 nm full-width half-maximum. We provide an explicit design procedure for identifying the optimum geometrical parameters according to the developed design. Besides, we fabricate and optically characterize a proof-of-concept waveguide structure. The results of the microphotoluminescence measurements provide evidence for cavity-enhanced spontaneous emission from the quantum dot, thus supporting the potential of our design for on-chip single-photon sources applications.en530 Physiknanobeam cavitieson-chip single-photon sourcessingle-photon sourceswaveguide-based nanobeamnanohole cavitiesArticle1094-4087