GaAs-based subwavelength grating on an AlOx layer for a vertical-cavity surface-emitting laser
Liu, Anjin; Yang, Bo; Wolf, Philip; Zhang, Jing; Bimberg, Dieter
A GaAs-based subwavelength grating on a thick (∼3/4*λ at 1300 nm) AlOx layer is designed, fabricated, and characterized. The AlOx layer as a low-index medium is oxidized from a 640-nm Al0.9Ga0.1As layer. The layer contraction of the Al0.9Ga0.1As layer after wet oxidation to AlOx is 4.9%. We fabricated GaAs-based subwavelength gratings on the AlOx layer showing a high reflectivity of 90% in the 1300-nm wavelength range, consistent with the simulation results. Such GaAs-based subwavelength gratings can be used as high-contrast grating mirrors for narrow-linewidth VCSELs, improving the mechanical stability and simplifying the device fabrication.
- © 2020 Optical Society of America. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved.
